铬板光罩 / Mask/Reticle
铬板光罩 / Mask/Reticle / 铬板光罩
| Item | Mask/Reticle | Substrate | Material | Thickness | Ratio | Min L/S:±Tolerance |
Total pitch
accuracy ( machine
type ) |
| High-Level Products Competitive Price (Taiwan: +886-3-4579538) | Mask | 4"X4"~ 9"X9" | QZ / SL | X 0.06" / 0.09" / 0.12" | 1× | 1um~:±0.08um~ | >± 1µm ~ |
| 10"X10"~ 800 X 960mm | X 0.12" / 4.8mm / 7.8mm | 5um~:±0.5um~ | |||||
| Master Mask | 4"X4"~ 9"X9" | QZ / SL | X 0.06" / 0.09" / 0.12" | 1× | 5um~:±0.5um~ | <± 1µm | |
| Copy Mask | 4"X4"~ 9"X9" | 5um~:± 10%~ | <± 1µm *(1+ 10%) | ||||
| TOP- Level Products |
Reticle(Pellicle Applicable) | 5"X5" | QZ | X0.09" | 1×, 5× | 0.5um~:±0.08um | <± 1µm(Nikon, Canon, ASML, Ultratec etc.) |
| 6"X6" | X0.25" | 1×, 5× | |||||
